JPH03104728U - - Google Patents
Info
- Publication number
- JPH03104728U JPH03104728U JP1251990U JP1251990U JPH03104728U JP H03104728 U JPH03104728 U JP H03104728U JP 1251990 U JP1251990 U JP 1251990U JP 1251990 U JP1251990 U JP 1251990U JP H03104728 U JPH03104728 U JP H03104728U
- Authority
- JP
- Japan
- Prior art keywords
- developing device
- turntable
- low speed
- drive shaft
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1251990U JPH03104728U (en]) | 1990-02-10 | 1990-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1251990U JPH03104728U (en]) | 1990-02-10 | 1990-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03104728U true JPH03104728U (en]) | 1991-10-30 |
Family
ID=31515995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1251990U Pending JPH03104728U (en]) | 1990-02-10 | 1990-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03104728U (en]) |
-
1990
- 1990-02-10 JP JP1251990U patent/JPH03104728U/ja active Pending
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